Charged with the task of improving yield, product engineers need to find the location of defects in manufactured ICs quickly and efficiently. Typically, they use volume scan diagnosis to generate ...

In laser-based manufacturing, accommodating non-flat, or changing surfaces has traditionally been labor-intensive, involving complex focus mapping procedures and or ex-situ characterization. This ...

Illustration of the working principle of dynamic z-scanning for auto-focusing. Dynamic beam shaping is achieved by a single TAG lens operating at 140-380kHz in a dual beam path setup (probing beam in ...