Until 2016, it was impossible to incorporate a femtosecond laser—an ultra-short pulse duration laser—onto a 5-axis machine. This was first realized by the Swiss group Georg Fischer in 2016, thereby ...
T he fabrication facility contains a 3" contact mask alignment and photoresist exposure system, fume hoods, spin coating station, non-contact wafer profilometer, PDMS mixer and degasser, oven, AC ...
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