In the semiconductor industry, ion implantation process has expanded to a wide range of applications with doses and energies spanning several orders of magnitude. Ion implantation is a very ...

Asymmetries in wafer map defects are usually treated as random production hardware defects. For example, asymmetric wafer defects can be caused by particles inadvertently deposited on a wafer during ...

Form device structure using only ion implantation process without epitaxy for the cost effective mass production of high-performance SiC power semiconductors by developing ion implantation process ...

Gloucester, Mass.-based ion-implant toolmaker Varian Semiconductor Equipment Associates Inc. recently received U.S. patent No. 6,130,436 for an advanced ion-implant architecture incorporating what ...

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In an update to its annual International Technology Roadmap for Photovoltaics, German engineering association VDMA discusses the readiness level for various technologies in PV cell and module ...

LONDON — Processor vendor Advanced Micro Devices Inc. has started running wafers through Fab36, the company's 300-mm wafer fab located in Dresden, Germany and is on course to have commercial ...